Equivalent Material Model is a staple method that can be used to imitate the strata and the ground surface movement which caused by human’s underground activities, such as coal resources extraction. The precision of indoor imitations are mainly decided by ways of models’ deformation observation. This paper proposes a new method of measuring models after analyzing the status of deformation observation of equivalent material models. In this paper, the industrial measuring system is used to measure deformations of the model. The system includes two main parts: photographic surveying of industry instruments and structure lighting scanning devices. The first part is used to get the coordinates of the target points which are set on the model; the second one is used to scan the model surface for catching the cracks on the model surface. Due to the high accuracy of photographic surveying of industry method, it can meet the need of monitoring imperceptible movements of target points; also the structure lighting scanning has a high precision on scanning the model surface, which can get the very thick points cloud of the model surface. The system is originally used for reverse engineering, and it scarcely used for Equivalent material model until our research used, so there is no mature method on data management. This paper researches the special data procession method for the model, and results show that methods in the paper are suit for the industrial measuring system.