Advances in semiconductor technology lead to the advancements in integrated circuits which have enhanced performance, reliability, cost effective, low power consumption, etc. To build a complex digital circuitry, millions of transistors are to be embedded onto a single chip to increase the performance and to improve the reliability of the electronic device. This paper aims at building of N-MOSFET, P-MOSFET, CMOS inverter and NAND gate using conventional SiO2 oxide layer and high k oxide layer each of 45nm, 32nm and 22nm technologies respectively and to determine the percentage reduction in power dissipation using high k oxide layer in each device. The above mentioned devices are built using an online Predictive Technology Model tool and H-Spice simulation software and the simulated results are compared.